Metadata-Version: 2.4
Name: machball
Version: 0.3.0
Summary: self-limited (ALD, ALE) reactive transport in nanostructures
Author: Angel Yanguas-Gil
License-Expression: BSD-3-Clause
Project-URL: Homepage, https://github.com/aldsim/machball
Project-URL: Repository, https://github.com/aldsim/machball
Project-URL: Issues, https://github.com/aldsim/machball/issues
Keywords: atomic layer deposition,microelectronics,ALD,ballistic transport,Markov Chains
Classifier: Programming Language :: Python :: 3
Classifier: Programming Language :: Python :: 3 :: Only
Classifier: Operating System :: OS Independent
Classifier: Intended Audience :: Science/Research
Classifier: Topic :: Scientific/Engineering :: Physics
Requires-Python: >=3.10
Description-Content-Type: text/markdown
License-File: LICENSE
Requires-Dist: numpy
Provides-Extra: test
Requires-Dist: pytest; extra == "test"
Provides-Extra: docs
Requires-Dist: zensical; extra == "docs"
Requires-Dist: mkdocstrings[python]; extra == "docs"
Dynamic: license-file

# What is Machball?

Machball models the reactive transport
inside high aspect ratio and nanostructured materials for
self-limited processes such as atomic layer deposition (ALD)
and atomic layer etching (ALE).

It predicts conformality based on the underlying surface kinetics
and process parameters such as the precursor pressure and the
dose time. It models precursor transport under Knudsen flow conditions using
a ballistic transport models based on random re-emission statistics.

# Documentation

Machball's documentation can be found under docs and in
[documentation](https://aldsim.github.io/machball/)

# Install instructions

Using pip:
```
pip install machball
```

From github:
```
git clone https://github.com/aldsim/machball.git
cd machball/
pip install -e .
```

# Quickstart

You can model ALD inside a high aspect ratio feature with just
a few lines of code:
```
from machball import ALDIdeal
from machball.ballistic import Via
ald = ALDIdeal(1e-2, 100, 473, 10, 10e-20, betarec=0)
st = Via(50, 100) # Aspect ratio, and number of segments
dose_times, coverages = ald.saturation_ballistic(st)
```

# Authors

Machball was developed at Argonne National Laboratory. Currently
the team comprises:

* Angel Yanguas-Gil, <ayg@anl.gov>, Lead and founder
* Jeffrey W Elam

# Citing

If you are referencing Machball in a publication, please cite
the following paper:

* Ballistic transport model:

    A. Yanguas-Gil and J. W. Elam, **A Markov chain approach to
    simulate Atomic Layer Deposition chemistry and transport inside
    nanostructured substrates**, Theoretical Chemistry Accounts
    133, Article number: 1465 (2014). http://dx.doi.org/10.1007/s00214-014-1465-x


# Acknowledgements

Machball development was partially funded through Argonne's
Laboratory Directed Research and Development program.

# Copyright and license

Copyright (2013-2025), UChicago Argonne, LLC

Machball is distributed under the terms of the BSD License. A
copy of the license can be found [here](https://github.com/aldsim/machball/blob/master/LICENSE)

Argonne Software Number: SF-13-072
